Advanced Micro and Nanosystems

Combining robotics with nanotechnology, this ready reference summarizes the fundamentals and emerging applications in this fascinating research field. This is the first book to introduce tools specifically designed and made for manipulating micro-and nanometer-sized objects and presents such examples as semiconductor packaging and clinical diagnostics as well as surgery. The first part discusses various topics of on-chip and device-based micro-and nanomanipulation, including the use of acoustic, magnetic, optical or dielectrophoretic fields, while surface-driven and high-speed microfluidic manipulation for biophysical applications are also covered. In the second part of the book, the main focus is on microrobotic tools. Alongside magnetic micromanipulators, bacteria and untethered, chapters also discuss silicon nano-and integrated optical tweezers. The book closes with a number of chapters on nanomanipulation using AFM and nanocoils under optical and electron microscopes. Exciting images from the tiniest robotic systems at the nano-level are used to illustrate the examples throughout the work. A must-have book for readers with a background ranging from engineering to nanotechnology.

This must-have book is the first self-contained summary of recent developments in the field of microscale nuclear magnetic resonance hardware, covering the entire technology from miniaturized detectors, the signal processing chain, and detection sequences. Chapters cover the latest advances in interventional NMR and implantable NMR sensors, as well as in using CMOS technology to manufacture miniaturized, highly scalable NMR detectors for NMR microscopy and high-throughput arrays of NMR spectroscopy detectors.

With its inclusion of the fundamentals, systems and applications, this reference provides readers with the basics of micro energy conversion along with expert knowledge on system electronics and real-life microdevices. The authors address different aspects of energy harvesting at the micro scale with a focus on miniaturized and microfabricated devices. Along the way they provide an overview of the field by compiling knowledge on the design, materials development, device realization and aspects of system integration, covering emerging technologies, as well as applications in power management, energy storage, medicine and low-power system electronics. In addition, they survey the energy harvesting principles based on chemical, thermal, mechanical, as well as hybrid and nanotechnology approaches. In unparalleled detail this volume presents the complete picture-and a peek into the future-of micro-powered microsystems.

This book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

This ready reference provides an up-to-date, self-contained summary of recent developments in the technologies and systems for thermoelectricity. Following an initial chapter that introduces the fundamentals and principles of thermoelectricity, subsequent chapters discuss the synthesis and integration of various bulk thermoelectric as well as nanostructured materials. The book then goes on to discuss characterization techniques, including various light and mechanic microscopy techniques, while also summarizing applications for thermoelectric materials, such as micro-and nano-thermoelectric generators, wearable electronics and energy conversion devices. The result is a bridge between industry and scientific researchers seeking to develop thermoelectric generators.